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2 "ApplPhysLett" 0.0 0.0 0.0 x_fact 12.835780 y_fact 33.672779
3 "JApplPhys" 0.0 0.0 0.0 x_fact 15.811286 y_fact 29.577441
4 "JMicroelectromechS" 0.0 0.0 0.0 x_fact 0.647879 y_fact 1.003113
5 "JMicromechMicroeng" 0.0 0.0 0.0 x_fact 1.938561 y_fact 2.593207
6 "JVacSciTechnolB" 0.0 0.0 0.0 x_fact 4.653562 y_fact 6.812031
7 "MicrosystTechnol" 0.0 0.0 0.0 x_fact 0.380608 y_fact 0.490561
8 "Science" 0.0 0.0 0.0 x_fact 0.409365 y_fact 6.159077
9 "SensorActuatAPhys" 0.0 0.0 0.0 x_fact 1.542730 y_fact 2.696394
10 "SensorActuatBChem" 0.0 0.0 0.0 x_fact 1.595169 y_fact 4.174843
*Matrix 
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